한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.159-162
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- 2002
강유전체 $YMno_{3}$ 박막의 건식식각 특성연구
Study of dry etching chrateristics of freeoelectric $YMnO_{3}$ thin films
- Kim, In-Pyo (ChungAng University) ;
- Park, Jae-Hwa (ChungAng University) ;
- Kim, Kyoung-Tae (ChungAng University) ;
- Kim, Chang-Il (ChungAng University) ;
- Jang, Eui-Goo (ChungAng University) ;
- Eom, Joon-Chul (Seoul Jeongsu Polytechnic College)
- 발행 : 2002.11.07
초록
Ferroelectric