Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
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- Pages.140-143
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- 2002
A Study of the Crystallographic Properties of $ZnO/SiO_{2}/Si$ Thin Film for FBAR
FBAR 용 $ZnO/SiO_{2}/Si$ 박막의 결정학적 특성에 관한 연구
- Keum, Min-Jong ;
- Yun, Youn-So ;
- Choi, Myung-Gyu ;
- Chu, Soon-Nam ;
- Choi, Hyung-Wook ;
- Kim, Kyung-Hwan
- Published : 2002.11.07
Abstract
In this study, we prepared ZnO/glass and