한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.103-106
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- 2002
Two-Step 스퍼터링 법에 의한 $Co_{77}Cr_{20}Ta_{3}$ 박막의 결정학적 특성
Crystallograpic Characteristic of $Co_{77}Cr_{20}Ta_{3}$ Thin Films by Two-Step Sputtering
- Park, Won-Hyo (Kyungwon univ.) ;
- Lee, Deok-Jin (Far East univ.) ;
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Park, Yong-Seo
(Kyungwon univ.) ;
- Choi, Hyung-Wook (Kyungwon univ.) ;
- Son, In-Hwan (Shinsung college) ;
- Kim, Kyung-Hwan (Kyungwon univ.)
- 발행 : 2002.11.07
초록
We prepared