한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 춘계학술대회 논문집 초전도 자성체
- /
- Pages.72-75
- /
- 2002
GMR 다층박막에서 표면 에칭에 따른 자기저항변화 효과
Effect of Surface etching on Magnetoresistance of GMR Multilayer
초록
Magnetoresistance (MR) of mumetal/Co/Co/Co multilayer is measured as a function of surface etching on the top Co layer by ion beam etching system. As the etching process proceeds, Co thickness and roughness decreases. MR is dominantly affected by Co layer thickness, but surface roughness makes no significant effect on the MR of mumetal/Co/Cu/Co multilayer.