Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07b
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- Pages.1030-1033
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- 2002
Photoluminescence characteristics of ZnO thin films by Pulsed laser deposition
PLD를 이용한 ZnO 박막의 발광에 관한 연구
- Published : 2002.07.08
Abstract
ZnO thin films on (100)p-type silicon substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YGA laser with a wavelength of 266nm. The influence of the deposition parameters, such as oxygen pressure, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiments were performed for substrate temperatures in the range of