한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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- Pages.1022-1025
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- 2002
수광영역의 식각을 통한 단일확산 공정의 고속 평판형 InP/InGaAs 10Gb/s 광 검출기의 신뢰성
High-Speed, High-Reliability Planar-Structure InP/InGaAs Avalanche Photodiodes for 10Gb/s Optical Receivers with Recess Etching
- 발행 : 2002.07.08
초록
This paper presents the reliability of planar InP/InGaAs avalanche photodiodes (APD's) with recess etching, which is very crucial for the commercial 10-Gb/s optical receiver application. A versatile design for the planar InP/InGaAs APD's and bias-temperature tests to evaluate long-term reliability at temperature from 200 to