한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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- Pages.764-768
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- 2002
낮은 접촉 저항을 갖는 Co/Si/co n형 4H-SiC의 오옴성 접합
Low resistivity Ohmic Co/Si/Co contacts to n-type 4H-SiC
초록
Characteristics of ohmic Co/Si/Co contacts to n-type 4H-SiC are investigated systematically. The ohmic contacts were formed by annealing Co/Si/Co sputtered sequentially. The annealings were performed at