Tape casting 법을 이용한 적층형 세라믹 액츄에이터의 제작

Fabrication of Multilayer Ceramic Actuator using Tape Casting Method

The rheological characteristics of PNN-PZT ceramics with high electromechanical coupling factor and electricstrictive constant was investigated. Green sheets of piezoelectric PNN-PZT ceramics were made by tape-casting method with controlling the mixing ratio of a dispersant, an organic binder, and a plasticizer. When the dispersant content was 1 wt.%, the slurry showed the best rheological characteristics for tape casting. The amounts of the plasticizer and the binder was simultaneously varied in the ranges of 1.5~18 and 3~9 wt.%, respectively. When both the plasticizer and binder of 6 wt.% mixed in the solution, respectiveley, the highest green density of the sheet was obtained without macrodefects. Multilyered structures of PNN-PZT/Ag-Pd were successfully fabricated using the optimized tape casting condition. The polarization behavior of these actuators seemed to similar to typical electricstrictive polarization behavior. The multilayer ceramic actuator is about $0.6{\times}10^{-3}$ of strain.