Noise Characteristics of dry pump according to change of vaccum degree

진공도 변화에 따른 건식 진공펌프의 소음특성

This study reports on physical properties of the noise radiation caused by expansion of exhaust gas and vibration of pumps according to change of vaccum degree. The fundamental responses show that the sound power level radiated is proportional to the common logarithm of the degree of vaccum.