Fabrication of V-grooved Mold for the Light Guide Plate of TFT-LCD with MEMS Technology

  • Lee, Woon-Seob (Department of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Han, Man-Hee (Department of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Lee, Sung-Keun (Department of Mechanical Engineering, Pohang University of Science and Technology) ;
  • Lee, Seung-S (Department of Mechanical Engineering, Pohang University of Science and Technology)
  • 발행 : 2002.08.21

초록

We present a novel fabrication method for a V-grooved mold of the light guide plat of TFT-LCD with MEMS technology. This method is performed by the inclined UV lithography and Ni electroplating unlike the previous mechanical processing technique. V-grooves with different dimension can be made simultaneously with single photomask.

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