한국정보디스플레이학회:학술대회논문집
- 2002.08a
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- Pages.846-848
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- 2002
Characteristics of linearly Extended Inductively Coupled Plasmas with Magnetic Fields
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Lee, Young-Joon
(Department of Materials Engineering, Sungkyunkwan University) ;
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Kim, Kyung-Nam
(Department of Materials Engineering, Sungkyunkwan University) ;
- Song, Byoung-Kwan (Department of Materials Engineering, Sungkyunkwan University) ;
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Yeom, Geun-Young
(Department of Materials Engineering, Sungkyunkwan University)
- Published : 2002.08.21
Abstract
A large-area (830mm
Keywords