한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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The Effect of Catalysts on the Growth Characteristic of Carbon Nanotubes

  • Lee, Tae-Young (Center for Nanotubes and Nanostructured composites, Sungkyunkwan University) ;
  • Han, Jae-Hee (Center for Nanotubes and Nanostructured composites, Sungkyunkwan University) ;
  • Choi, Sun-Hong (Center for Nanotubes and Nanostructured composites, Sungkyunkwan University) ;
  • Yoo, Ji-Beom (Center for Nanotubes and Nanostructured composites, Sungkyunkwan University) ;
  • Park, Chong-Yun (Center for Nanotubes and Nanostructured composites, Sungkyunkwan University) ;
  • Jung, Tae-Won (Materials and Devices lab, Samsung Advanced Institute of Technology) ;
  • Yu, Se-Gi (Materials and Devices lab, Samsung Advanced Institute of Technology) ;
  • Yi, Whi-Kun (Materials and Devices lab, Samsung Advanced Institute of Technology) ;
  • Kim, Jong-Min (Materials and Devices lab, Samsung Advanced Institute of Technology)
  • Published : 2002.08.21
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Abstract

Vertically aligned carbon nanotubes (CNTs) have been produced using various type of plasma enhanced chemical vapor deposition (PECVD). Catalysts such as Ni, Co, and Fe are used for growth of CNTs. To explain the effect of catalysts on the growth characteristics of CNTs, carbon species of $C_2H_2$ was observed in different catalysts using optical emission spectroscopy (OES) with theoretical calculation on the surface reaction in different catalysts.

Keywords