한국전자현미경학회:학술대회논문집

한국현미경학회 (Korean Society of Microscopy)
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A study on effect of electron beam irradiation in the oxidized poly-Sil-xGex films

  • Kang, Han-Byul (School of Metallurgical and Materials Eng., Sungkyunkwan University) ;
  • Lee, Jun-Ho (School of Metallurgical and Materials Eng., Sungkyunkwan University) ;
  • Yang, Cheol-Woong (School of Metallurgical and Materials Eng., Sungkyunkwan University)
  • 발행 : 2002.11.01
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