대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
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- Pages.49-51
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- 2002
죠셉슨 소자구현을 위한 YBCO다층 박막 제작 및 특성
Fabrication and Charactreization of YBCO Multi-layer Thin Films for Josephson device
- Lee, H.S. (Masan college) ;
- Park, J.Y. (Kyungnam Univ.) ;
- Park, S.H. (Kyungnam Univ.) ;
- Lee, D.H. (Kyungnam Univ.) ;
- Park, H.J. (Kyungnam Univ.) ;
- Kim, Y.J. (Kyungnam Univ.)
- 발행 : 2002.06.30
초록
In this thesis, Josephson junction using high-Tc superconducting multi-layer thin film has been fabricated by on-axis RF magnetron sputtering method. And, the characterizations were performed by X-ray diffraction, SEM and the measuring system of critical current density. The physical properties of multi-layer superconducting thin films were also analyzed with the measured results. To fabricate the multi-layer superconducting thin films, the optimum partial pressure of Argon and Oxgen and the temperature of substrate were measured. Also, YBaCuO thin film was grown on MgO and
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