Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.11c
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- Pages.309-312
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- 2002
Development of an Inchworm type Actuator for an Ultra Precise Linear Stage
초정밀 리니어 스테이지용 인치웜 타입 구동장치 개발
- Moon, Chan-Woo (Korea Electronics Technology Institute) ;
- Lee, Sung-Ho (Korea Electronics Technology Institute) ;
- Chung, Jung-Kee (Korea Electronics Technology Institute) ;
- Lee, Jong-Bae (Korea Electronics Technology Institute)
- Published : 2002.11.30
Abstract
Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.
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