한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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- Pages.112-114
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- 2002
Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas
- Ahn, Kang-Ho (Dept. Mechanical Engineering) ;
- Han, Jang-Sik (Dept. Mechanical Engineering) ;
- Kim, Gon-Ho (Dept. Appled Physics, Hanyang University)
- 발행 : 2002.11.01