Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2002.11a
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- Pages.112-114
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- 2002
Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas
- Ahn, Kang-Ho (Dept. Mechanical Engineering) ;
- Han, Jang-Sik (Dept. Mechanical Engineering) ;
- Kim, Gon-Ho (Dept. Appled Physics, Hanyang University)
- Published : 2002.11.01
Abstract
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