Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2002.11a
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- Pages.91-93
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- 2002
Prevention of degradation in poly $Si_{1-x}Ge_x$ /high K structure by controlling Ge content in poly $Si_{1-x}Ge_x$ films
- Ko, D.H. (Department of Ceramic Engineering, Yonsei University) ;
- Kang, S.K. (Department of Ceramic Engineering, Yonsei University) ;
- Yoo, J.H. (Department of Ceramic Engineering, Yonsei University) ;
- Min, B.G. (Department of Ceramic Engineering, Yonsei University) ;
- Nam, S.W. (Department of Ceramic Engineering, Yonsei University) ;
- Kang, H.B. (School of Metallurgy and Material Engineering, Sung Kyun Kwan University) ;
- Yang, C.W. (School of Metallurgy and Material Engineering, Sung Kyun Kwan University) ;
- Cho, M.H. (School of Material Science and Engineering, Stanford University)
- Published : 2002.11.01
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