한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
- /
- Pages.50-53
- /
- 2002
Thickness Measurement of Thin Film for End-Point Detector(EPD) of Spin Etcher Using the White Light Interferometry
- Kim, No-Hyu (Dept. of Mechatronics Engineering, Korea University of Technology and Education) ;
- Chang, Young-Chul (Dept. of Mechatronics Engineering, Korea University of Technology and Education) ;
- Cho, Jung-Keun (DNS Korea)
- 발행 : 2002.11.01