Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Thickness Measurement of Thin Film for End-Point Detector(EPD) of Spin Etcher Using the White Light Interferometry

  • Kim, No-Hyu (Dept. of Mechatronics Engineering, Korea University of Technology and Education) ;
  • Chang, Young-Chul (Dept. of Mechatronics Engineering, Korea University of Technology and Education) ;
  • Cho, Jung-Keun (DNS Korea)
  • Published : 2002.11.01
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