FEM analysis of the magnetic closed type RF integrated inductor

Recently, RF lumped-element devices are demanded strongly in application of hand-held mobile communication equipments. Many workers have been reported RF integrated inductor as well as air cores. In order to achieve the high Q value, they removed backside of substrate by micro machining process [1] and also another MEMS-like approach such as levitated structure [2]. These approaches are capable of suppressing the parasitic effects, but low reproducibility and high cost problems remain. (omitted)