Fabrication of Nanocrystalline FeCoTaN Magnetic Films Having High Saturation Magnetization and Excellent High Frequency Characteristics

고 포화 자화 및 우수한 고주파 특성을 가진 나노결정 FeCoTaN 박막의 제조

  • J. M. Shin (Hanyang University) ;
  • Kim, J. (Hanyang Universit) ;
  • Kim, Y. M. (Korea Institute Science and Technolog) ;
  • S. H. Han (Korea Institute Science and Technolog) ;
  • Kim, H. J. (Korea Institute Science and Technology)
  • Published : 2002.12.01

Abstract

High saturation magnetization (B$\_$s/) and excellent high frequency characteristics of magnetic thin films has been recognized as the most important requirement for further miniaturization and higher frequency operation in magnetic devices, such as magnetic heads and magnetic sensors. Up to now, Fe-X-N (X =Ti, Hf, and Al etc.) films with B$\_$s/ of 15 ∼ 19 kG and coercivity (H$\_$c/) of 0.5 ∼ 5.0 Oe have been successfully fabricated and proven to satisfy various requirements as a potential candidate for thin film head materials. (omitted)

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