삼차원적으로 배향한 Poly($\alpha, \alpha, \alpha′, \alpha′$-tetrafluoro-p-xylylene) 필름의 구조 연구

A Three-Dimensionally Oriented Texture for Poly($\alpha, \alpha, \alpha′, \alpha′$-tetrafluoro-p-xylylene)

  • Park, Soo-Young (Kyungpook National University, Department of Polymer Science) ;
  • S. Chvalun (Case Western Reserve University, Department of Macromolecular Scienc) ;
  • John Blackwell (Case Western Reserve University, Department of Macromolecular Science)
  • 발행 : 2002.04.01

초록

Poly(p-xylylene) (PPX) is most easily prepared by a vapor deposition polymerization (VDP) of [2, 2]paracychophane, as described by Gorham.$^1$ Poly(tetrafluoro-p-xylylene) (F-PPX) is of interest in view of its potential applications as an interlayer dielectric material in high-speed integrated circuits, since it has an extremely low dielectric constant (〈2.35).$^2$ (omitted)

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