Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2002.07a
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- Pages.172-173
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- 2002
THz Photonics and the meaurement of dielectric and optical properties of thin films
테라헬츠 포토닉스와 여러 가지 나노박막의 유전 및 장학적 특성의 측정
Abstract
As feature sizes of circuits and devices approach 100 m and chip frequencies climb into the upper gigahertz to terahertz range, it becomes increasingly important to have a convenient method of characterizing properties of thin dielectric films in the GHz to THz frequency range [1]. To measure the dielectric and optical properties of materials at THz frequency, a TH2 time-domain spectroscopy has been utilized during past decade. (중략)
Keywords