THz Photonics and the meaurement of dielectric and optical properties of thin films

테라헬츠 포토닉스와 여러 가지 나노박막의 유전 및 장학적 특성의 측정

As feature sizes of circuits and devices approach 100 m and chip frequencies climb into the upper gigahertz to terahertz range, it becomes increasingly important to have a convenient method of characterizing properties of thin dielectric films in the GHz to THz frequency range [1]. To measure the dielectric and optical properties of materials at THz frequency, a TH2 time-domain spectroscopy has been utilized during past decade. (중략)