단결정 성장용 초전도 마그네트의 제작 및 성능평가

Fabrication and Test Results of Superconducting Magnet for Crystal Growing System

Magnetic field is necessary to control the convection of melted silicon and to improve the quality of the wafer in the 12inch silicon wafer growing process. Nowadays, superconducting magnet is used in this process. We fabricated and tested a saddle shaped superconducting magnet for 8inch silicon wafer growing system. And the protection circuits for HTS current lead and superconducting coil are designed and manufactured. In this paper, their manufacturing process and test results are introduced.