Micro Thermal System Component Development

마이크로 열시스템 부품 설계

  • 전병선 (서울대학교 기계항공공학부) ;
  • 박건중 (서울대학교 기계항공공학부) ;
  • 민홍석 (서울대학교 재료공학부) ;
  • 제갈승 (서울대학교 기계항공공학부) ;
  • 김세준 (서울대학교 기계항공공학부) ;
  • 방정환 (서울대학교 기계항공공학부) ;
  • 송성진 (서울대학교 기계항공공학부) ;
  • 주영창 (서울대학교 재료공학부) ;
  • 민경덕 (서울대학교 기계항공공학부)
  • Published : 2002.10.01

Abstract

Micro turbine that is a component of micro thermal system refers to turbines on the scale of centimeters which can transmit power on the order of tens of Watts. Such devices can be used as propulsion or power generation devices for various potable and micro devices. An interdisciplinary team at Seoul National University has designed, fabricated and tested such a device, and this paper describes each phase. A commercial code has been used for design, and MEMS processes have been used for manufacturing. Finally, some preliminary test results are presented.

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