Proceedings of the Korean Society of Rheology Conference (한국유변학회:학술대회논문집)
- 2002.11a
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- Pages.59-62
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- 2002
Flow behavior at the embossing stage of nanoimprint lithography
나노임프린트리소그래피의 엠보싱 과정에서의 흐름거동
- Jeong, Jun-Ho (Korea Institute of achinery and materials, Department of Intelligent Precision Machine) ;
- Park, Yun-Suk (KyungWon Tech Corporation) ;
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Shin, Yung-Jae
(Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
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Lee, Jae-Jong
(Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
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Park, Kyoung-Taik
(Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
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Lee, Eung-Sug
(Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
- Lee, Sang-Rok (Korea Institute of Machinery and materials, Department of Intelligent Precision Machine)
- Published : 2002.11.01
Abstract
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Keywords