Fabrication and Characterization of Ultra-thin and Smooth Pb(Zr,Ti)O$_3$ Films for Miniatunzation of Microelectronic Devices

  • Jongin Hong (Korea Advanced Institute of Science and Technology) ;
  • Park, Jongwan (Korea Advanced Institute of Science and Technology) ;
  • Kwangsoo No (Korea Advanced Institute of Science and Technology)
  • Published : 2002.11.01