한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2002년도 추계학술발표강연 및 논문개요집
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- Pages.76-76
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- 2002
$AlCl_3$ 와 $TiCl_4$ 전구체로부터 형성된 $Ti_{0.83}Al_{0.17}N$ 원자층 증착 박막의 열역학적인 고려
Thermodynamic consideration to atomic layer deposition of $Ti_{0.83}Al_{0.17}N$ thin films from $AlCl_3$ and $TiCl_4$ Precursors
- Lee, Yong-Ju (Korea Advanced Institute of Science and Technology (KAIST)) ;
- Kang, Sang-Won (Korea Advanced Institute of Science and Technology (KAIST))
- 발행 : 2002.11.01