Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2002.05a
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- Pages.6-6
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- 2002
Photocatalytic $TiO_2$ thin film deposited by Inductively Coupled Plasma assisted sputtering
유도 결합 플라즈마 스퍼터링 증착법에 의한 광촉매용 $TiO_2$ 증착
- Published : 2002.05.01
Abstract
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