Plasma-Polymerized Toluene Films for Corrosion Inhibition in Microelectronic Devices

  • Park, Yoon-Seok (Department of Advanced Materials Engineering, SungkyunKwan University) ;
  • Yu, Yong-Jae (Department of Advanced Materials Engineering, SungkyunKwan University) ;
  • Kim, Jung-Gu (Department of Advanced Materials Engineering, SungkyunKwan University) ;
  • Boo, Jin-Hyo (Department of Chemistry, SungkyunKwan University)
  • 발행 : 2002.05.01