Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2002.05a
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- Pages.3-3
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- 2002
Plasma-Polymerized Toluene Films for Corrosion Inhibition in Microelectronic Devices
- Park, Yoon-Seok (Department of Advanced Materials Engineering, SungkyunKwan University) ;
- Yu, Yong-Jae (Department of Advanced Materials Engineering, SungkyunKwan University) ;
- Kim, Jung-Gu (Department of Advanced Materials Engineering, SungkyunKwan University) ;
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Boo, Jin-Hyo
(Department of Chemistry, SungkyunKwan University)
- Published : 2002.05.01
Abstract
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