초정밀 다축 위치제어장치 개발 및 보정에 관한 연구

A Study on the Development and Compensation of precision Multi-Axis Positioning System

In recent years, precision positioning stage is demanded fur some industrial fields such as semi conductor lithography, ultra precision machining and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of it such as 3-axis positioning, characteristic of motion and resolution is verified.