한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2002년도 추계학술대회 논문집
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- Pages.361-365
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- 2002
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- 2005-8446(pISSN)
Inductive Sensor를 이용한 고진공 분자펌프용 자기부상계의 제어
Control of a Magnetic Suspension System with Inductive Sensors for a High Vacuum Turbomolecular Pump
초록
In this paper, a magnetic suspension system with inductive sensors fur a high vacuum turbomolecular pump(TMP) is discussed. The performance of designed inductive position sensor is evaluated by static and dynamic test, and the test results show sensitivity of about 6,000 V/m and dynamic bandwidth of 750 ㎐. The protype of magnetic suspension system is designed and constructed with 5-axis magnetic bearing, inductive sensor and BLDC internal motor. With DSP based digital PID control system, the prototype is examined its high damping ratio and stable operation up to 20,000 rpm of rotation.
키워드