한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2002년도 추계학술대회 논문집
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- Pages.214-218
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- 2002
압전 액츄에이터를 이용한 초정밀 위치제어장치 개발
Development of Nano Positioning Stage using PZT Actuator
초록
In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.
키워드