Real-time 3D Monitoring ＆ Simulation of Cluster Type Semiconductor Manufacturing Equipments

클러스터형 반도체 장비의 실시간 3차원 모니터링 및 시뮬레이션

The Semiconductor Industrial are developed after 1940. It was called “Rice of Industrial”. It needs great effect in Electronics. It was developed highly in recent several years with semiconductor manufacturing equipments. Semiconductor manufacturing devices are developed “In-line” type in the first stage. But It was non-effective in modem many type process. Because this reason, Cluster type manufacturing equipments are proposed. Cluster have ability of many-type-process and effective-scheduling by circular type process chamber In this paper. we propose a real-time 3D monitoring and simulation of this semiconductor manufacturing equipments. By proposed monitoring method, we have capability real visual maintanance & virtual simulation. This effective visual 3D monitoring could apply another dangerous environment in entire industrial.