Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
- /
- Pages.146-146
- /
- 2002
A Study on the Growth Property of Carbon Nanotubes at Low Temperature by DC Bais-assisted Inductively Coupled Plasma Hot-Filament CVD
직류바이어스가 인가된 ICPHFCVD 법에 의한 탄소나노튜브의 저온 성장 특성 연구
Abstract
Keywords