Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
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- Pages.61-61
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- 2002
Step coverage of $TiO_2$ thin films by MOCVD
MOCVD법으로 증착한$TiO_2$ 박막의 단차피복성
Abstract
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