Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2002.11a
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- Pages.196-197
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- 2002
Real time control of Ge-Sb-Te multi-layer as optical recording media using in situ ellipsometry
In-situ Ellipsometer를 사용한 광기록매체용 Ge-Sb-Te 다층박막성장의 실시간 제어
Abstract
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