Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07a
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- Pages.410-413
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- 2002
Modeling of ZrO$_2$ dielectric characteristics
ZrO$_2$ 유전체의 전기적 특성 모델링
Abstract
In this paper, the performance of high-k dielectric is modeled by observing electrical characteristics through the process and device simulation. ZrO