한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집
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- Pages.58-61
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- 2002
Ar/Cl$_2$ 유도결합플라츠마 식각 후 SBT 박막의 전기적 특성
Electrical Properties of SBT Thin Films after Etching in Cl$_2$ /Ar Inductively Coupled Plasma
초록
SBT thin films were etched at different content of Cl