The shape measurement of 3D object by using the method of interference pattern projection.

간섭무늬 투영 방식의 3차원 형상 측정

The 3-D measurement using interference pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The patters was generated by a interferometer, and a PZT was used to shift the fringes on the target surface. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. A working system requires a interferometer, a PZT, and a detector array interfaced to a microcomputer. Results of measurements on the diffused test objects are described.