대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.2008-2010
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- 2002
후막 감광제를 이용한 $100{\mu}m$ 두께 몰드 제작과 전해도금
Fabrication of $100{\mu}m$ thick mold and electroplating using thick photoresist
- Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Ahn, Si-Hong (School of Electrical Engineering and Computer Science, Seoul National University) ;
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Kim, Yong-Kweon
(School of Electrical Engineering and Computer Science, Seoul National University)
- 발행 : 2002.07.10
초록
Process conditions of a novel negative thick photoresist, JSR THB-
키워드