고속 유체분사 시스템을 위한 마크네틱 마이크로 액츄에이터 어래이

Magnetic Microactuator Array for High Speed Fluid Injection System

This paper reports a novel high-speed fluid injection system employing a simple magnetic micoractuator. This magnetic microacutator consists of current carrying copper beams and permanent magnet under the beams. There were many efforts to magnetic microactuator realization using conducting coils [1-2]. Even though many of magnetic microactuators were successfully fabricated and tested, it is true that most them suffer complex fabrication processes and thus higher production costs than electrostatic counterparts. In this research, efforts were concentrated on the microactuator realization that has simple structure, low production cost, and mass production possibility.