대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.1969-1971
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- 2002
저전압구동 무선통신용 MEMS 스위치
Low Pull-in Voltage MEMS Switches for Wireless Applications
- 심동하 (삼성종합기술원 MEMS Lab.) ;
- 이문철 (삼성종합기술원 MEMS Lab.) ;
- 이은성 (삼성종합기술원 MEMS Lab.) ;
- 박선희 (삼성종합기술원 MEMS Lab.) ;
- 김영일 (삼성종합기술원 MEMS Lab.) ;
- 송인상 (삼성종합기술원 MEMS Lab.)
- Shim, Dong-Ha (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Lee, Moon-Chul (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Lee, Eun-Sung (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Park, Sun-Hee (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Kim, Young-Il (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Song, In-Sang (MEMS Lab., Samsung Advanced Institute of Technology)
- 발행 : 2002.07.10
초록
This paper presents the design and performance of low pull-in voltage MEMS switches for commercial cellular/PCS applications. The switches have all-metal (3
키워드