대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.1760-1762
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- 2002
축전 용량이 고려된 평판형 유도 결합 플라즈마 원의 등가회로 모델
An equivalent Circuit Model of Transformer Coupled Plasma Source
- Kim, Jeong-Mi (Chungbuk National University) ;
- Kwon, D.C. (Chungbuk National University) ;
- Yoon, N.S. (Chungbuk National University)
- 발행 : 2002.07.10
초록
In this work we develop an equivalent circuit model of TCP(transformer coupled plasma) source and investigate matching characteristic. The developed circuit model includes transmission line, standard-type impedance matching network and displacement current in the plasma source. The impedance of TCP is calculated by previously developed program for various source parameters and dependance of components of matching impedance on the value of source impedance is investigated.
키워드