Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.07c
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- Pages.1555-1558
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- 2002
Low Temperature Deposition of Microcrystalline Silicon Thin Films for Solar Cells
태양전지용 미세결정 실리콘 박막의 저온 증착
- Lee, J.C. (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Yoo, J.S. (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Kang, K.H. (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Kim, S.K. (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Yoon, K.H. (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Song, J. (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Park, I.J. (Photovoltaic Research Team, Korea Institute of Energy Research)
- 이정철 (한국에너지기술연구원, 태양광발전 연구팀) ;
- 유진수 (한국에너지기술연구원, 태양광발전 연구팀) ;
- 강기환 (한국에너지기술연구원, 태양광발전 연구팀) ;
- 김석기 (한국에너지기술연구원, 태양광발전 연구팀) ;
- 윤경훈 (한국에너지기술연구원, 태양광발전 연구팀) ;
- 송진수 (한국에너지기술연구원, 태양광발전 연구팀) ;
- 박이준 (한국에너지기술연구원, 태양광발전 연구팀)
- Published : 2002.07.10
Abstract
This paper presents deposition and characterizations of microcrystalline silicon(
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