대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 C
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- Pages.1533-1535
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- 2002
ICP-CVD 방법을 이용한 탄소나노튜브의 제작 및 물성분석
Characterization of structural properties of CNTs grown by ICP-CVD
- 장석모 (한양대학교 전자전기제어계측공학과) ;
- 김영도 (한양대학교 전자전기제어계측공학과) ;
- 박창균 (한양대학교 전자전기제어계측공학과) ;
- 엄현석 (한양대학교 전자전기제어계측공학과) ;
- 박진석 (한양대학교 전자전기제어계측공학과)
- Chang, Seok-Mo (Dept. of Electronic Electrical Control and Instrumentation Engineering, Hanyang University) ;
- Kim, Young-Do (Dept. of Electronic Electrical Control and Instrumentation Engineering, Hanyang University) ;
- Park, Chang-Kyun (Dept. of Electronic Electrical Control and Instrumentation Engineering, Hanyang University) ;
- Uhm, Hyun-Seok (Dept. of Electronic Electrical Control and Instrumentation Engineering, Hanyang University) ;
- Park, Jin-Seok (Dept. of Electronic Electrical Control and Instrumentation Engineering, Hanyang University)
- 발행 : 2002.07.10
초록
Carbon nanotubes (CNTs) were grown with high density on a large area of Ni-coated silicon oxide substrates by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) of
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