Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.07c
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- Pages.1473-1475
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- 2002
The study on dielectric properties of $Ta_2O_5$ thin films obtained by thermal oxidation
Thermal Oxidation 법으로 제조된 $Ta_2O_5$ 박막의 유전체 물성에 관한 연구
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Kim, I.S.
(Korea Electrotechnology Research Institute) ;
- Kim, H.J. (Changwon University) ;
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Min, B.K.
(Korea Electrotechnology Research Institute) ;
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Song, J.S.
(Korea Electrotechnology Research Institute)
- Published : 2002.07.10
Abstract
This study presents the dielectric properties of
Keywords