대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2002년도 하계학술대회 논문집 B
- /
- Pages.923-925
- /
- 2002
반도체 제조장비용 무접점 Inductive Coupler의 성능개선을 위한 연구
A Study on the Performence improvment of Contactless Inductive Coupler for the Stocker System
- 김현우 (한양대학교 전자전기컴퓨터공학부) ;
- 반상호 (한양대학교 전자전기컴퓨터공학부) ;
- 권호 (한양대학교 전자전기컴퓨터공학부) ;
- 박재범 (한양대학교 전자전기컴퓨터공학부) ;
-
이주
(한양대학교 전자전기컴퓨터공학부)
;
-
이철직
(대림대학)
;
- 김석태 (기술 표준원) ;
- 김준호 (기술 표준원)
- Kim, Hyun-Woo (Dept. of Electrical Engineering at Hanyang Univ.) ;
- Ban, Sang-Ho (Dept. of Electrical Engineering at Hanyang Univ.) ;
- Kwon, Ho (Dept. of Electrical Engineering at Hanyang Univ.) ;
- Park, Jae-Bum (Dept. of Electrical Engineering at Hanyang Univ.) ;
-
Lee, Ju
(Dept. of Electrical Engineering at Hanyang Univ.)
;
-
Lee, Chul-Jik
(Daelim Univ.)
;
- Kim, Suk-Tae (Korean Agency for Technology and Standards(KATS)) ;
- Kim, Jun-Ho (Korean Agency for Technology and Standards(KATS))
- 발행 : 2002.07.10
초록
The existing contactless inductive coupler has many problems because of its large volume and high level of exciting current, so a new contactless inductive coupler is being required under the circumstances and the load requirement. For a contactless inductive coupler in the manufacturing equipment of semiconductor, the coupler's efficiency is low because of its small magnetic inductance and large leakage inductance. Moreover, the high frequency switching to increase energy density per unit volume increases the iron loss and the eddy current loss, so it must be considered deeply when selecting core materials. Therefore, this paper presents core materials and shape to improve the performance of the contactless inductive coupler according to the coil positions.
키워드